AI Defect Metrology
Image surface detail in 3D at high Z-axis resolution
The BPT Clarity Pro 2D/3D Profiler is a breakthrough optical microscope that reveals surface detail in 3D with unmatched Z-axis resolution—while still performing all conventional optical imaging modes including:
- Bright Field
- Dark Field
- POL
- DIC
- NIR
One microscope with all the routine imaging modes BF, DF, DIC, POL, OBLIQUE, NIR & FL Plus a Smart-Scope with the next 3 steps in microscopy
- Nanometer scale 3D surface imaging and measurements
- Artificial Intelligence to perform defect analytics
- Multi-microscope unification and data mining to build a useful library of information.
100X objective
3µ microns line width
Height <1µ micron
Three steps beyond your average optical microscope
The BPT Clarity Pro 2D/3D Profiler is the next generation in complete and smart imaging microscopes. Capable of imaging in Bright Field, Dark Field, DIC, Oblique (directions: 360,180,90 60, 30 degrees) Fluorescence and NIR, it also extends surface roughness characterization down to the angstrom level faster and easier than an AFM.
The BPT Clarity Pro 2D/3D Profiler is the next generation in complete and smart imaging microscopes.
- Unique 3D surface roughness image with single digit angstrom resolution equal to an AFM
- Artificial Intelligence for defect identification and detection
- Multi-system Unification for data mining
- Open architecture frame for very large to very small samples
- Configured for manual or fully automated operation
- Easily accepts most sample loaders including but not limited to wafers loaders
Applications Gallery
Features
Outperforms other systems in the market
Z resolution better than 2 nm
Spatial resolution camera and optics dependent, 50x objective less than half a micron.
Works with consumer cameras and optics
Insensitive to DOF variation
Lowest cost