AI Defect Metrology


Image surface detail in 3D at high Z-axis resolution

The BPT Clarity Pro 2D/3D Profiler is a breakthrough optical microscope that reveals surface detail in 3D with unmatched Z-axis resolution—while still performing all conventional optical imaging modes including:

  • Bright Field
  • Dark Field
  • POL
  • DIC
  • NIR
Micro 3D Image
Micro 3D Image

One microscope with all the routine imaging modes BF, DF, DIC, POL, OBLIQUE, NIR & FL Plus a Smart-Scope with the next 3 steps in microscopy

  • Nanometer scale 3D surface imaging and measurements
  • Artificial Intelligence to perform defect analytics
  • Multi-microscope unification and data mining to build a useful library of information.
Micro 3D Image

100X objective
3µ microns line width
Height <1µ micron

Three steps beyond your average optical microscope

The BPT Clarity Pro 2D/3D Profiler is the next generation in complete and smart imaging microscopes. Capable of imaging in Bright Field, Dark Field, DIC, Oblique (directions: 360,180,90 60, 30 degrees) Fluorescence and NIR, it also extends surface roughness characterization down to the angstrom level faster and easier than an AFM.

The BPT Clarity Pro 2D/3D Profiler is the next generation in complete and smart imaging microscopes.

  1. Unique 3D surface roughness image with single digit angstrom resolution equal to an AFM
  2. Artificial Intelligence for defect identification and detection
  3. Multi-system Unification for data mining
    • Open architecture frame for very large to very small samples
    • Configured for manual or fully automated operation
    • Easily accepts most sample loaders including but not limited to wafers loaders


Features

Micro 3D Image

Outperforms other systems in the market

Micro 3D Image

Z resolution better than 2 nm

Micro 3D Image

Spatial resolution camera and optics dependent, 50x objective less than half a micron.

Micro 3D Image

Works with consumer cameras and optics

Micro 3D Image

Insensitive to DOF variation

Micro 3D Image

Lowest cost


Research Papers

ASSESSING ADVANTAGES AND DRAWBACKS OF RAPIDLY GENERATED ULTRA-LARGE 3D BREAST CANCER SPHEROIDS: STUDIES WITH CHEMOTHERAPEUTICS

by Austin R. Holub t, Anderson Huo t, Kavil Patel t, Vishal Thakore t, Pranav Chibber and Folarin Erogbogbo *

Pranav Chhibber works as an intern researcher at BrighTex Bio-Photonics.